Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates

• Main Authors: Nur Sa’adah, Muhamad Sauki, Herman, Sukreen Hana, Ani, Mohd Hanafi, Mohamad Rusop , Mahmood
• Format: Article
• Language: English
• Published: Trans Tech Publications, Switzerland 2013
• Subjects: TA Engineering (General). Civil engineering (General); TA401 Materials of engineering and construction
• Online Access: http://irep.iium.edu.my/37597/1/Electrical_properties_dependence_on_substrate_temperature_of_sputtered_ZnO_nanoparticles_thin_films_on_teflon_substrates.pdf; http://irep.iium.edu.my/37597/; http://www.scientific.net

Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and xray diffraction (XRD)...