Improvement of c-axis (002) AlN crystal plane by temperature assisted HiPIMS technique

• Main Authors: Azman, Zulkifli, Nayan, Nafarizal, Megat Hasnan, Megat Muhammad Ikhsan, Othman, Nurafiqah, Bakri, Anis Suhaili, Abu Bakar, Ahmad Shuhaimi, Mamat, Mohamad Hafiz, Mohd Yusop, Mohd Zamri
• Format: Article
• Published: Emerald 2021
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.um.edu.my/34003/

Purpose This study aims to investigate the effect of temperature applied at the initial deposition of Aluminium Nitride (AlN) thin-film on a silicon substrate by high-power impulse magnetron sputtering (HiPIMS) technique. Design/methodology/approach HiPIMS system was used to deposit AlN thin film at...