Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films

The growth of highly crystalline c-plane AlN �002� is extremely difficult, entailing high temperature and ultra-high vacuum condition. In sputtering technique, the addition of nitrogen into argon sputtering gas can significantly assist the formation of AlN �002� at low temperature. We incorporated p...

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Bibliographic Details
Main Authors: Samad M.I.A., Noor M.M., Nayan N., Bakar A.S.A., Mansor M., Zuhdi A.W.M., Hamzah A.A., Latif R.
Other Authors: 57768220600
Format: Article
Published: Acta Materialia Inc 2024
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