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Structural and mechanical properties of a-axis AlN thin films growth using reactive RF magnetron sputtering plasma

This paper aims to report the influence of sputtering plasma deposition time on the structural and mechanical properties of the a-axis oriented aluminium nitride (AlN) thin films. Design/methodology/approach The AlN films were prepared using RF magnetron sputtering plasma on a silicon substrate with...

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Bibliographic Details
Main Authors: Bakri, Anis Suhaili, Nayan, Nafarizal, Soon, Chin Fhong, Ahmad, Mohd Khairul, Abu Bakar, Ahmad Shuhaimi, Abd Majid, Wan Haliza, Raship, Nur Amaliyana
Format: Article
Published: Emerald 2021
Subjects:
Q Science (General)
QC Physics
QD Chemistry
Online Access:http://eprints.um.edu.my/28802/
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http://eprints.um.edu.my/28802/

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