Fabrication of suspended PMMA-Graphene membrane for high sensitivity LC-MEMS pressure sensor
The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in...
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Main Authors: | Yusof, Norliana, Bais, Badariah, Yunas, Jumril, Soin, Norhayati, Majlis, Burhanuddin Yeop |
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Format: | Article |
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MDPI
2021
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Online Access: | http://eprints.um.edu.my/27915/ |
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