Fabrication of suspended PMMA-Graphene membrane for high sensitivity LC-MEMS pressure sensor

• Main Authors: Yusof, Norliana, Bais, Badariah, Yunas, Jumril, Soin, Norhayati, Majlis, Burhanuddin Yeop
• Format: Article
• Published: MDPI 2021
• Subjects: Q Science (General); QD Chemistry
• Online Access: http://eprints.um.edu.my/27915/

The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in...