Design and analysis of MEMS high sensitive capacitive pressure sensor

• Main Authors: Ali, M., Soin, N., Noorakma, A.C.W., Yusof, N., Hatta, S.F.W.M.
• Format: Article
• Published: Medwell Journals 2016
• Subjects: TA Engineering (General). Civil engineering (General); TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/18230/; http://medwelljournals.com/abstract/?doi=jeasci.2016.2688.2692

In this study, MEMS high sensitive capacitive pressure sensor based on poly-silicon diaphragm have been designed and analysed by using COMSOL Multiphysics Software. Three sensor designs: clamped, 8 slotted and 4 slotted with and without Teflon (polytetrafluoroethylene) coating were tested and compar...