An alternative polymeric protection mask for bulk KOH etching of silicon
The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a significant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating serves as an alternative to the conventional silicon n...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/24999/1/an_alternative_polymeric.pdf http://irep.iium.edu.my/24999/ http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6235295 |
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