ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

• Main Authors: Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sugandi, Gandi
• Format: Article
• Language: English
• Published: Springer 2013
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/30323/1/Microsystem_Technologies_published_version_APRIL_2013.pdf; http://irep.iium.edu.my/30323/; http://link.springer.com/

The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a significant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating which serves as an alternative to the conventional silicon...