Fabrication of micromachined uniform microtrench arrays for silicon based filtration membrane

• Main Authors: Kamarul 'Asyikin Mustafa,, Burhanuddin Yeop Majlis,, Jumril Yunas,, Azrul Azlan Hamzah,
• Format: Article
• Language: English
• Published: Penerbit Universiti Kebangsaan Malaysia 2019
• Online Access: http://journalarticle.ukm.my/13708/1/03%20Kamarul%20Asyikin%20Mustafa.pdf; http://journalarticle.ukm.my/13708/; http://www.ukm.my/jsm/malay_journals/jilid48bil6_2019/KandunganJilid48Bil6_2019.html

In this paper, we report a uniform microtrench array fabricated on silicon substrate. The proposed system is aimed for the biological molecules separation process via filtration in artificial kidney. The system consists of silicon based membrane having arrays of trench with the dimension of approxim...