Performance Analysis and Calibration of a Novel CMOS-MEMS Humidity Sensor

This Study presents calibration and performance analysis of a novel CMOSMEMS humidity sensor that is fabricated using 0.35 μm CMOS technology with embedded micro-heater operates at high temperature, temperature sensor and piezoresistors for the purpose of relative humidity measurements. The devic...

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Bibliographic Details
Main Author: Ba Wazir, Abdulaziz Saleh Mahfoudh
Format: Final Year Project
Language:English
Published: IRC 2016
Subjects:
Online Access:http://utpedia.utp.edu.my/17189/1/FYP%20Dissertation.pdf
http://utpedia.utp.edu.my/17189/
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