Finite Element Analysis of a Mass-Sensitive CMOS-MEMS Resonator using CoventorWare Simulation Software

• Main Authors: Dennis , John Ojur, Ahmed, Abdelaziz Yousif, Md Khir, Mohd Haris, Mohamad Saad, Mohamad Naufal
• Format: Conference or Workshop Item
• Published: 2012
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://ieeexplore.ieee.org; http://eprints.utp.edu.my/8799/

The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto th...