Performance analysis of PDMS polymer as a MEMS FPOTF actuator

The usage of polymer as Micro-electro-mechanical system (MEMS) actuator has received a great intention due to high elasticity characteristic, hence lower the power consumption [1]. Poly-dimethyl siloxane (PDMS) is one of the polymers that widely used in MEMS application. This chapter evaluates the s...

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Bibliographic Details
Main Authors: Mohammad, Abu Bakar, Ngajikin, Nor Hafizah, Mohd. Kassim, Norazan
Format: Book Section
Language:English
Published: Penerbit UTM 2008
Subjects:
Online Access:http://eprints.utm.my/id/eprint/25455/1/AbuBakarMohammad2008_PerformanceAnalysisOfPDMSPolymer.pdf
http://eprints.utm.my/id/eprint/25455/
http://www.penerbit.utm.my/bookchapterdoc/FKE/bookchapter_fke38.pdf
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