Performance Analysis and Calibration of a Novel CMOS-MEMS Humidity Sensor

• Main Author: Ba Wazir, Abdulaziz Saleh Mahfoudh
• Format: Final Year Project
• Language: English
• Published: IRC 2016
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://utpedia.utp.edu.my/17189/1/FYP%20Dissertation.pdf; http://utpedia.utp.edu.my/17189/

This Study presents calibration and performance analysis of a novel CMOSMEMS humidity sensor that is fabricated using 0.35 μm CMOS technology with embedded micro-heater operates at high temperature, temperature sensor and piezoresistors for the purpose of relative humidity measurements. The devic...