MEMS gas sensors: a review

• Main Authors: Ahmad Asri, Muhammad Izzudin, Hasan, Md. Nazibul, Ahmad Fuaad, Mariatul Rawdhah, Md. Yunos, Yusri, Mohamed Ali, Mohamed Sultan
• Format: Article
• Published: Institute of Electrical and Electronics Engineers Inc. 2021
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/94263/; http://dx.doi.org/10.1109/JSEN.2021.3091854

Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years...