Optimization of a CMOS-MEMS Resonator for Applications of Relative Humidity Measurement
The mathematical modeling and the finite element analysis (FEA) of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) resonator has been presented. The resonator is designed based on 0.35 µm CMOS foundry fabrication technology. The sensing principle of the resonat...
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| Format: | Final Year Project |
| Language: | English |
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Universiti Teknologi PETRONAS
2017
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| Online Access: | http://utpedia.utp.edu.my/22962/1/FINAL%20DISSERTATION.pdf http://utpedia.utp.edu.my/22962/ |
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