Analytical Modeling of Mass-Sensitive Gas Sensor based on MEMS Resonator

• Main Authors: Ahmed, Abdelaziz Yousif, Dennis, John Ojur, Khir, M Haris M, Mohamad Saad, Mohamad Naufal
• Format: Conference or Workshop Item
• Published: 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://www.ieee.org; http://eprints.utp.edu.my/7236/

Modeling of a micromachined MEMS resonator for gas detection is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microcantilever due to change in mass induced by the adsorption of an analyte molecule onto the surface of...