DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS MASS-SENSITIVE RELATIVE HUMIDITY SENSOR

• Main Author: AHMED ALMAHI, ABDELAZIZ YOUSIF
• Format: Thesis
• Language: English
• Published: 2015
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://utpedia.utp.edu.my/21542/1/2015%20-ELECTRICAL%20%26%20ELECTRONIC%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20CMOS-MEMS%20MASS-SENSITIVE%20RELATIVE%20HUMIDITY%20SENSOR%20-%20ABDELAZIZ%20YOUSIF%20AHMED%20ALMAHI.pdf; http://utpedia.utp.edu.my/21542/

This research presents the design of CMOS-MEMS device with embedded microheater operating at relatively elevated temperatures (40°C to 150°C) for the purpose of relative humidity measurement. It is designed, simulated, fabricated and characterized to resolve the problem of reversibility and stabi...