Fabrication of planar microcoils for LC-MEMS pressure sensor
This paper addresses the design and fabrication of a small scale planar microcoil for LC-MEMS pressure sensor application. A simple process flow based on MEMS fabrication is presented and the key aspects of the processing are discussed. The fabricated microcoils were characterized both morphological...
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Main Authors: | Norliana, Yusof, Badariah, Bais, Norhayati, Soin, Muhamad Ramdzan, Buyong, Burhanuddin, Yeop |
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Format: | Conference or Workshop Item |
Language: | English English |
Published: |
2020
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Subjects: | |
Online Access: | http://eprints.unisza.edu.my/1826/1/FH03-FRIT-20-42025.pdf http://eprints.unisza.edu.my/1826/2/FH03-FRIT-20-42026.pdf http://eprints.unisza.edu.my/1826/ |
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