Fabrication of planar microcoils for LC-MEMS pressure sensor
This paper addresses the design and fabrication of a small scale planar microcoil for LC-MEMS pressure sensor application. A simple process flow based on MEMS fabrication is presented and the key aspects of the processing are discussed. The fabricated microcoils were characterized both morphological...
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my-unisza-ir.18262020-11-23T04:39:16Z http://eprints.unisza.edu.my/1826/ Fabrication of planar microcoils for LC-MEMS pressure sensor Norliana, Yusof Badariah, Bais Norhayati, Soin Muhamad Ramdzan, Buyong Burhanuddin, Yeop T Technology (General) TK Electrical engineering. Electronics Nuclear engineering This paper addresses the design and fabrication of a small scale planar microcoil for LC-MEMS pressure sensor application. A simple process flow based on MEMS fabrication is presented and the key aspects of the processing are discussed. The fabricated microcoils were characterized both morphologically and electrically. The characterizations performed on the fabricated microcoils showed that the aluminum traces from end to end contact displayed good connection with high conductivity. The inductance, resistance and quality factor (Q-factor) value of microcoils were measured at 2.49 uH, 58.4 U and 0.27, respectively at a 1 MHz operating frequency. The square planar microcoil was successfully fabricated and is applicable for future LC-MEMS pressure sensor application. 2020 Conference or Workshop Item NonPeerReviewed text en http://eprints.unisza.edu.my/1826/1/FH03-FRIT-20-42025.pdf text en http://eprints.unisza.edu.my/1826/2/FH03-FRIT-20-42026.pdf Norliana, Yusof and Badariah, Bais and Norhayati, Soin and Muhamad Ramdzan, Buyong and Burhanuddin, Yeop (2020) Fabrication of planar microcoils for LC-MEMS pressure sensor. In: 2020 IEEE International Conference on Semiconductor Electronics, 28-29 Jul 2020. |
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T Technology (General) TK Electrical engineering. Electronics Nuclear engineering Norliana, Yusof Badariah, Bais Norhayati, Soin Muhamad Ramdzan, Buyong Burhanuddin, Yeop Fabrication of planar microcoils for LC-MEMS pressure sensor |
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This paper addresses the design and fabrication of a small scale planar microcoil for LC-MEMS pressure sensor application. A simple process flow based on MEMS fabrication is presented and the key aspects of the processing are discussed. The fabricated microcoils were characterized both morphologically and electrically. The characterizations performed on the fabricated microcoils showed that the aluminum traces from end to end contact displayed good connection with high conductivity. The inductance, resistance and quality factor (Q-factor) value of microcoils were measured at 2.49 uH, 58.4 U and 0.27, respectively at a 1 MHz operating frequency. The square planar microcoil was successfully fabricated and is applicable for future LC-MEMS pressure sensor application. |
format |
Conference or Workshop Item |
author |
Norliana, Yusof Badariah, Bais Norhayati, Soin Muhamad Ramdzan, Buyong Burhanuddin, Yeop |
author_facet |
Norliana, Yusof Badariah, Bais Norhayati, Soin Muhamad Ramdzan, Buyong Burhanuddin, Yeop |
author_sort |
Norliana, Yusof |
title |
Fabrication of planar microcoils for LC-MEMS pressure sensor |
title_short |
Fabrication of planar microcoils for LC-MEMS pressure sensor |
title_full |
Fabrication of planar microcoils for LC-MEMS pressure sensor |
title_fullStr |
Fabrication of planar microcoils for LC-MEMS pressure sensor |
title_full_unstemmed |
Fabrication of planar microcoils for LC-MEMS pressure sensor |
title_sort |
fabrication of planar microcoils for lc-mems pressure sensor |
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2020 |
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http://eprints.unisza.edu.my/1826/1/FH03-FRIT-20-42025.pdf http://eprints.unisza.edu.my/1826/2/FH03-FRIT-20-42026.pdf http://eprints.unisza.edu.my/1826/ |
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13.18916 |