Miniaturized planar sensor development

• Main Authors: Azmi, Aizat, Abdul Rahim, Ruzairi, Chee, Pei Song, Mohammad Din, Shahrulnizahani, Nor Ayob, Nor Muzakkir, Leow, Pei Ling
• Format: Article
• Language: English
• Published: Penerbit UTM 2014
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/54110/1/RuzairiAbdulRahim2014_Miniaturizedplanarsensordevelopment.pdf; http://eprints.utm.my/id/eprint/54110/; http://dx.doi.org/10.11113/jt.v69.3303

This paper describes the process of developing a miniature device with planar sensors utilizing electrical capacitance measurement. The project investigates the feasibility and characterization of a miniaturized planar sensor integrated on a polydimethylsiloxane (PDMS) chamber. A 16-planar-electrode...