Analysis of the deposited carbon during Electron Beam Induced Deposition (EBID) in Scanning Electron Microscope using Secondary Ion Mass Spectrometry (SIMS)

• Main Author: Nur Liana Kamal
• Other Authors: Shaiful Nizam Mohyar (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Electron beams; Scanning electron microscopes; Silicon; Nanostructures; Semiconductors; Integrated circuits
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1973

Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron beam induced deposition (EBID) has been used to deposit carbon films that are similar to those that have recently been used for clamping nanostructures. The film de...