Nanowire formation for single electron transistor using SEM based Electron Beam Lithography (EBL) technique: Positive tone vs negative tone e-beam resist
Link to publisher's homepage at http://www.nsti.org/Nanotech2006/
Saved in:
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Nano Science and Technology Institute
2009
|
Subjects: | |
Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/6977 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|