Nanowire formation for single electron transistor using SEM based Electron Beam Lithography (EBL) technique: Positive tone vs negative tone e-beam resist

Link to publisher's homepage at http://www.nsti.org/Nanotech2006/

Saved in:
Bibliographic Details
Main Authors: Mohammad Nuzaihan, Md Nor, Uda, Hashim, Nur Hamidah, Abdul Halim, Bajuri, S. N M
Format: Article
Language:English
Published: Nano Science and Technology Institute 2009
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/6977
Tags: Add Tag
No Tags, Be the first to tag this record!