Holdings: Study of the temperature effect on thickness and surface roughness of SiO2

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Bibliographic Details
Main Author:	Mohd Azdi Asis
Other Authors:	Ruslinda A. Rahim (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Semiconductors Silicon oxide Silicon > Oxidation Integrated circuits > Design and construction
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1990
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