Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)

• 主要作者: Mohamad Sharizal Md Ilias
• 其他作者: Shaiful Nizam Mohyar (Advisor)
• 格式: Learning Object
• 语言: English
• 出版: Universiti Malaysia Perlis 2008
• 主题: Atomic Force Microscope; Electron beams; Scanning electron microscopes; Microelectronics; Semiconductors > Design and construction; Clean rooms
• 在线阅读: http://dspace.unimap.edu.my/xmlui/handle/123456789/2001

Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on this geometry of wear. One way to improve the tip geometry is by fabricate a sl...