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The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method

Electron beam induced deposition (EBID) is a method for high-resolution direct material deposition from the gas phase in the Scanning Electron Microscopy (SEM) onto a substrate. In this project, EBID method has been used to deposit the square shape carbon structure on the substrate using the resid...

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Bibliographic Details
Main Author: Muhammad Afiq Abdul Aziz
Other Authors: Shaiful Nizam Mohyar (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Microelectronics
Electron beams
Semiconductors
Electrons > Beams
Electron microscopy
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1961
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http://dspace.unimap.edu.my/xmlui/handle/123456789/1961

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