Holdings: Study of aspect ratio performance on Silicon Oxide wet etching by using Profilometer, AFM and SEM

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Bibliographic Details
Main Author:	Nur Syuhada Md.Desa
Other Authors:	Nurjuliana Juhari (Advisor)
Format:	Learning Object
Language:	English
Published:	Universiti Malaysia Perlis 2008
Subjects:	Silicon oxide Silicon > Oxidation Scanning electron microscopes Silicon Integrated circuits > Design and construction Semiconductors > Etching
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1992
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