Sensitivity and Q-Factor trade-off analysis of MEMS pressure sensor for bladder implants
Ultra-small and highly sensitive MEMS bladder sensor has to be aligned with efficient wireless coupling to meet the requirements of minimally invasive implantation. In this study, finite element analysis (FEA) is conducted to investigate sensor's sensitivity and Q-factor on MEMS capacitive pr...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | http://eprints.unisza.edu.my/1264/1/FH03-FRIT-19-23912.pdf http://eprints.unisza.edu.my/1264/ |
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