Activation energy of thermal oxidation germanium oxide on germanium substrates
The activation energy of GeO2 was studied by determining the oxide thickness versus temperature from lower to higher oxidation temperature in the range between 450˚C and 600Ԩ. It was found that a linear relationship can be obtained between oxidation time and oxide thickness for the oxidation te...
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Main Authors: | Halim, N.A.A., Sahari, S.K., Hamzah, A.A., Majlis, B.Y., Marini, Sawawi, Hasanah, L., Kashif, M. |
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Format: | Article |
Language: | English |
Published: |
IEEE
2018
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Subjects: | |
Online Access: | http://ir.unimas.my/id/eprint/26229/3/Activation.pdf http://ir.unimas.my/id/eprint/26229/ https://ieeexplore.ieee.org/document/8481204 |
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