Activation energy of thermal oxidation germanium oxide on germanium substrates

• Main Authors: Halim, N.A.A., Sahari, S.K., Hamzah, A.A., Majlis, B.Y., Marini, Sawawi, Hasanah, L., Kashif, M.
• Format: Article
• Language: English
• Published: IEEE 2018
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://ir.unimas.my/id/eprint/26229/3/Activation.pdf; http://ir.unimas.my/id/eprint/26229/; https://ieeexplore.ieee.org/document/8481204

The activation energy of GeO2 was studied by determining the oxide thickness versus temperature from lower to higher oxidation temperature in the range between 450˚C and 600Ԩ. It was found that a linear relationship can be obtained between oxidation time and oxide thickness for the oxidation te...