Activation energy of thermal oxidation germanium oxide on germanium substrates
The activation energy of GeO2 was studied by determining the oxide thickness versus temperature from lower to higher oxidation temperature in the range between 450˚C and 600Ԩ. It was found that a linear relationship can be obtained between oxidation time and oxide thickness for the oxidation te...
Saved in:
Main Authors: | , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2018
|
Subjects: | |
Online Access: | http://ir.unimas.my/id/eprint/26229/3/Activation.pdf http://ir.unimas.my/id/eprint/26229/ https://ieeexplore.ieee.org/document/8481204 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
id |
my.unimas.ir.26229 |
---|---|
record_format |
eprints |
spelling |
my.unimas.ir.262292022-06-24T02:49:42Z http://ir.unimas.my/id/eprint/26229/ Activation energy of thermal oxidation germanium oxide on germanium substrates Halim, N.A.A. Sahari, S.K. Hamzah, A.A. Majlis, B.Y. Marini, Sawawi Hasanah, L. Kashif, M. TK Electrical engineering. Electronics Nuclear engineering The activation energy of GeO2 was studied by determining the oxide thickness versus temperature from lower to higher oxidation temperature in the range between 450˚C and 600Ԩ. It was found that a linear relationship can be obtained between oxidation time and oxide thickness for the oxidation temperature between 450 and 575Ԩ while for the 600Ԩ ��������, a linear relationship can be obtained for the shorter oxidation time. The rate of oxidation increased until 0.55 and abruptly decreased after increasing oxidation temperature to 600Ԩ which implies that the oxygen intermixing occurs during higher oxidation (600Ԩ) rather that diffusion mechanism that leads to the lower activation energy. IEEE 2018 Article PeerReviewed text en http://ir.unimas.my/id/eprint/26229/3/Activation.pdf Halim, N.A.A. and Sahari, S.K. and Hamzah, A.A. and Majlis, B.Y. and Marini, Sawawi and Hasanah, L. and Kashif, M. (2018) Activation energy of thermal oxidation germanium oxide on germanium substrates. 2018 IEEE International Conference on Semiconductor Electronics (ICSE), 2018. ISSN ISBN: 978-1-5386-5283-1 https://ieeexplore.ieee.org/document/8481204 DOI: 10.1109/SMELEC.2018.8481204 |
institution |
Universiti Malaysia Sarawak |
building |
Centre for Academic Information Services (CAIS) |
collection |
Institutional Repository |
continent |
Asia |
country |
Malaysia |
content_provider |
Universiti Malaysia Sarawak |
content_source |
UNIMAS Institutional Repository |
url_provider |
http://ir.unimas.my/ |
language |
English |
topic |
TK Electrical engineering. Electronics Nuclear engineering |
spellingShingle |
TK Electrical engineering. Electronics Nuclear engineering Halim, N.A.A. Sahari, S.K. Hamzah, A.A. Majlis, B.Y. Marini, Sawawi Hasanah, L. Kashif, M. Activation energy of thermal oxidation germanium oxide on germanium substrates |
description |
The activation energy of GeO2 was
studied by determining the oxide thickness versus
temperature from lower to higher oxidation temperature
in the range between 450˚C and 600Ԩ. It was found that
a linear relationship can be obtained between oxidation
time and oxide thickness for the oxidation temperature
between 450 and 575Ԩ while for the 600Ԩ ��������, a
linear relationship can be obtained for the shorter
oxidation time. The rate of oxidation increased until 0.55
and abruptly decreased after increasing oxidation
temperature to 600Ԩ which implies that the oxygen
intermixing occurs during higher oxidation (600Ԩ) rather
that diffusion mechanism that leads to the lower
activation energy. |
format |
Article |
author |
Halim, N.A.A. Sahari, S.K. Hamzah, A.A. Majlis, B.Y. Marini, Sawawi Hasanah, L. Kashif, M. |
author_facet |
Halim, N.A.A. Sahari, S.K. Hamzah, A.A. Majlis, B.Y. Marini, Sawawi Hasanah, L. Kashif, M. |
author_sort |
Halim, N.A.A. |
title |
Activation energy of thermal oxidation germanium oxide on germanium substrates |
title_short |
Activation energy of thermal oxidation germanium oxide on germanium substrates |
title_full |
Activation energy of thermal oxidation germanium oxide on germanium substrates |
title_fullStr |
Activation energy of thermal oxidation germanium oxide on germanium substrates |
title_full_unstemmed |
Activation energy of thermal oxidation germanium oxide on germanium substrates |
title_sort |
activation energy of thermal oxidation germanium oxide on germanium substrates |
publisher |
IEEE |
publishDate |
2018 |
url |
http://ir.unimas.my/id/eprint/26229/3/Activation.pdf http://ir.unimas.my/id/eprint/26229/ https://ieeexplore.ieee.org/document/8481204 |
_version_ |
1736838280477933568 |
score |
13.18916 |