Activation energy of thermal oxidation germanium oxide on germanium substrates
The activation energy of GeO2 was studied by determining the oxide thickness versus temperature from lower to higher oxidation temperature in the range between 450˚C and 600Ԩ. It was found that a linear relationship can be obtained between oxidation time and oxide thickness for the oxidation te...
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Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2018
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Subjects: | |
Online Access: | http://ir.unimas.my/id/eprint/26229/3/Activation.pdf http://ir.unimas.my/id/eprint/26229/ https://ieeexplore.ieee.org/document/8481204 |
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Summary: | The activation energy of GeO2 was
studied by determining the oxide thickness versus
temperature from lower to higher oxidation temperature
in the range between 450˚C and 600Ԩ. It was found that
a linear relationship can be obtained between oxidation
time and oxide thickness for the oxidation temperature
between 450 and 575Ԩ while for the 600Ԩ ��������, a
linear relationship can be obtained for the shorter
oxidation time. The rate of oxidation increased until 0.55
and abruptly decreased after increasing oxidation
temperature to 600Ԩ which implies that the oxygen
intermixing occurs during higher oxidation (600Ԩ) rather
that diffusion mechanism that leads to the lower
activation energy. |
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