Design and Simulation of MEMS Electrostatic Resonator for Ammonia Gas Detection Based on SOIMUMPs

• Main Authors: Ba Hashwan, S.S., Md Khir, M.H., Al-Douri, Y., Yousif, A., Ramza, H., Arjo, S.
• Format: Conference or Workshop Item
• Published: Institute of Electrical and Electronics Engineers Inc. 2021
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-85124168317&doi=10.1109%2fICIAS49414.2021.9642706&partnerID=40&md5=999c4b0b94452e0b7795b0842ad485b0; http://eprints.utp.edu.my/29182/

The analytical modeling, design, and simulation of micromachined MEMS resonator for ammonia gas detection is presented in this paper. The MEMS resonator is designed to be vibrated electrostatically using interdigitated comb fingers. The demonstrated device is designed to be capable to carry micro-ri...