Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design

Malaysian Technical Universities Conference on Engineering and Technology (MUCET) 2012 organised by technical universities under the Malaysian Technical Universities Network (MTUN), 20th - 21st November 2012 at Hotel Seri Malaysia, Kangar, Perlis.

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Bibliographic Details
Main Authors: Rosmani, Ramli, Ahmad Alabqari, Ma'razi
Other Authors: abqari@uthm.edu.my
Format: Working Paper
Language:English
Published: Malaysian Technical Universities Network (MTUN) 2013
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/26593
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