Frequency analysis of electrostatic cantilever-based MEMS sensor
This paper presents an analytical approach to model the dynamic behavior and predict the frequency of electrostatic cantilever based MEMS (Microelectromechanical system) sensor for mass detection. The concept of dynamic mass is used to formulate the resonance frequency in damped and undamped medium....
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2015
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| Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84945943332&doi=10.1109%2fDTIP.2015.7161013&partnerID=40&md5=3c5cea622071e3a88600330fcba59298 http://eprints.utp.edu.my/26227/ |
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