Optical and capacitive characterization of MEMS magnetic resonator

• Main Authors: Mian, M.U., Dennis, J.O., Khir, M.H.B.M., Ahmed, M.G.A., Rabih, A.A.S., Tang, T.B.
• Format: Article
• Published: Institute of Electronics Information Communication Engineers 2016
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51; http://eprints.utp.edu.my/25482/

In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz for...