Characterization of embedded microheater of a CMOS�MEMS gravimetric sensor device

• Main Authors: Dennis, J.O., Rabih, A.A.S., Md Khir, M.H., Ahmed, A.Y., Ahmed, M.G., Mian, M.U.
• Format: Article
• Published: Elsevier Ltd 2016
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84982813103&doi=10.1016%2fj.mejo.2016.07.005&partnerID=40&md5=072a10e7e532e96c8f4b0fc99b35b08b; http://eprints.utp.edu.my/25665/

A CMOS�MEMS device for mass detection has been designed using 2008 CoventorWare software and fabricated using 0.35 µm CMOS technology. This paper reports the characterization of the microheater and the temperature sensor embedded in the device. The measured resistances of the microheater and the...