Characterization of CMOS-MEMS device for acetone vapor detection in exhaled breath

• Main Authors: Rabih, A.A.S., Khir, M.H.M., Ahmed, A.Y., Ahmed, M.G.A., Dennis, J.O.
• Format: Conference or Workshop Item
• Published: Institute of Electrical and Electronics Engineers Inc. 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963820501&doi=10.1109%2fRSM.2015.7354966&partnerID=40&md5=1af2e2d86add3285df36efb146dd3745; http://eprints.utp.edu.my/26181/

A MEMS vapor sensor for acetone detection in exhaled breath (EB) has been fabricated using 0.35 μm CMOS technology. Acetone vapor in EB is used as a non-invasive method for diabetes screening, which is currently conducted invasively by measuring blood glucose in blood. This paper studies the charac...