Optical and capacitive characterization of MEMS magnetic resonator
In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz for...
Saved in:
Main Authors: | , , , , , |
---|---|
Format: | Article |
Published: |
Institute of Electronics Information Communication Engineers
2016
|
Online Access: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51 http://eprints.utp.edu.my/25482/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|