A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors

• Main Authors: Sutri, N.Y., Dennis, J.O., Khir, M.H.M., Ahmed, A.Y., Mian, M.U.
• Format: Conference or Workshop Item
• Published: Institute of Electrical and Electronics Engineers Inc. 2015
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962581641&doi=10.1109%2fAFRCON.2015.7332004&partnerID=40&md5=5f22f8b5a414cdb5f8e684858a39d655; http://eprints.utp.edu.my/26189/

This paper presents a monolithic, low-noise capacitive readout interface circuit for CMOS-MEMS resonator based gravimetric chemical gas sensors. In these sensor devices, where the sense capacitances are usually very weak, the readout interface circuit plays a crucial role in determining the overall...