Non-traditional machining techniques for silicon wafers
Silicon (Si) micromachining techniques have recently witnessed significant advancement, attributable to the high surge in demand for microelectromechanical and microelectronic devices. Micromachining techniques are widely used to cut or pattern Si, in order to obtain high-quality surface finishes fo...
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Main Authors: | Daud, Noor Dzulaikha, Hasan, Md. Nazibul, Saleh, Tanveer, Leow, Pei Ling, Mohamed Ali, Mohamed Sultan |
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Format: | Article |
Language: | English |
Published: |
Springer Science and Business Media Deutschland GmbH
2022
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/100913/1/NoorDzulaikhaDaud2022_NonTraditionalMachiningTechnique.pdf http://eprints.utm.my/id/eprint/100913/ http://dx.doi.org/10.1007/s00170-022-09365-z |
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