Heat-assisted μ-electrical discharge machining of silicon
Micro-electrical discharge machining (µEDM) is an unconventional machining method that is suitable for machining of conductive materials including highly doped silicon (Si) wafers. This paper reports a novel method of heat-assisted µEDM machining of Si wafers by varying the temperature to increase t...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Springer Science and Business Media Deutschland GmbH
2021
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/95226/ http://dx.doi.org/10.1007/s00170-021-06734-y |
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