Improving μ-wire electro-discharge machining operation of polished silicon wafer by conductive coating

• Main Authors: Rasheed, Aous Naji, Abdul Muthalif, Asan Gani, Saleh, Tanveer
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2014
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/37351/1/ICOMM_2014_aous.pdf; http://irep.iium.edu.my/37351/2/ICOMM_2014_proof.pdf; http://irep.iium.edu.my/37351/; http://minds.wisconsin.edu/handle/1793/68989?show=full

Micro-Wire Electro-discharge machining (-WEDM) is a nonconventional machining technology which is extensively used for metal based micro fabrication process. This is a non-contact machining process where material removal is taken place by electro-thermal action. -WEDM process is difficult to be...