Non-traditional machining techniques for silicon wafers
Silicon (Si) micromachining techniques have recently witnessed significant advancement, attributable to the high surge in demand for microelectromechanical and microelectronic devices. Micromachining techniques are widely used to cut or pattern Si, in order to obtain high-quality surface finishes fo...
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Springer Science and Business Media Deutschland GmbH
2022
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Online Access: | http://eprints.utm.my/id/eprint/100913/1/NoorDzulaikhaDaud2022_NonTraditionalMachiningTechnique.pdf http://eprints.utm.my/id/eprint/100913/ http://dx.doi.org/10.1007/s00170-022-09365-z |
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my.utm.1009132023-05-18T04:26:32Z http://eprints.utm.my/id/eprint/100913/ Non-traditional machining techniques for silicon wafers Daud, Noor Dzulaikha Hasan, Md. Nazibul Saleh, Tanveer Leow, Pei Ling Mohamed Ali, Mohamed Sultan TK Electrical engineering. Electronics Nuclear engineering Silicon (Si) micromachining techniques have recently witnessed significant advancement, attributable to the high surge in demand for microelectromechanical and microelectronic devices. Micromachining techniques are widely used to cut or pattern Si, in order to obtain high-quality surface finishes for the fabrication of devices. Micromachining techniques are used for the fabrication of three-dimensional (3D) microstructures for microelectromechanical devices. In this work, the capabilities and competencies of non-traditional Si micromachining techniques, including ultrasonic, ion beam milling, laser machining, and electrical discharge machining, are discussed and compared accordingly. The working principles, advantages, limitations, and Si microstructures that have been fabricated before are discussed in detail. Additionally, this work covers the performance reported by multiple researchers on these micromachining methods, spanning the temporal range of 1990 to 2020. The key outcomes of this study are explored and summarized. Springer Science and Business Media Deutschland GmbH 2022 Article PeerReviewed application/pdf en http://eprints.utm.my/id/eprint/100913/1/NoorDzulaikhaDaud2022_NonTraditionalMachiningTechnique.pdf Daud, Noor Dzulaikha and Hasan, Md. Nazibul and Saleh, Tanveer and Leow, Pei Ling and Mohamed Ali, Mohamed Sultan (2022) Non-traditional machining techniques for silicon wafers. International Journal of Advanced Manufacturing Technology, 121 (1-2). pp. 29-57. ISSN 0268-3768 http://dx.doi.org/10.1007/s00170-022-09365-z DOI: 10.1007/s00170-022-09365-z |
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TK Electrical engineering. Electronics Nuclear engineering Daud, Noor Dzulaikha Hasan, Md. Nazibul Saleh, Tanveer Leow, Pei Ling Mohamed Ali, Mohamed Sultan Non-traditional machining techniques for silicon wafers |
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Silicon (Si) micromachining techniques have recently witnessed significant advancement, attributable to the high surge in demand for microelectromechanical and microelectronic devices. Micromachining techniques are widely used to cut or pattern Si, in order to obtain high-quality surface finishes for the fabrication of devices. Micromachining techniques are used for the fabrication of three-dimensional (3D) microstructures for microelectromechanical devices. In this work, the capabilities and competencies of non-traditional Si micromachining techniques, including ultrasonic, ion beam milling, laser machining, and electrical discharge machining, are discussed and compared accordingly. The working principles, advantages, limitations, and Si microstructures that have been fabricated before are discussed in detail. Additionally, this work covers the performance reported by multiple researchers on these micromachining methods, spanning the temporal range of 1990 to 2020. The key outcomes of this study are explored and summarized. |
format |
Article |
author |
Daud, Noor Dzulaikha Hasan, Md. Nazibul Saleh, Tanveer Leow, Pei Ling Mohamed Ali, Mohamed Sultan |
author_facet |
Daud, Noor Dzulaikha Hasan, Md. Nazibul Saleh, Tanveer Leow, Pei Ling Mohamed Ali, Mohamed Sultan |
author_sort |
Daud, Noor Dzulaikha |
title |
Non-traditional machining techniques for silicon wafers |
title_short |
Non-traditional machining techniques for silicon wafers |
title_full |
Non-traditional machining techniques for silicon wafers |
title_fullStr |
Non-traditional machining techniques for silicon wafers |
title_full_unstemmed |
Non-traditional machining techniques for silicon wafers |
title_sort |
non-traditional machining techniques for silicon wafers |
publisher |
Springer Science and Business Media Deutschland GmbH |
publishDate |
2022 |
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http://eprints.utm.my/id/eprint/100913/1/NoorDzulaikhaDaud2022_NonTraditionalMachiningTechnique.pdf http://eprints.utm.my/id/eprint/100913/ http://dx.doi.org/10.1007/s00170-022-09365-z |
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