Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining

• Main Authors: Jarin, Sams, Saleh, Tanveer, Muthalif, Asan G. A., Ali, Mohammad Yeakub, Bhuiyan, Moinul
• Format: Article
• Language: English; English; English
• Published: Springer Verlag 2018
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/66411/18/66411_Towards%20achieving%20nanofinish%20on%20silicon_complete.pdf; http://irep.iium.edu.my/66411/7/66411_Towards%20achieving%20nanofinish%20on%20silicon%20SCOPUS.pdf; http://irep.iium.edu.my/66411/12/66411%20Towards%20achieving%20nanofinish%20on%20silicon%20WOS.pdf; http://irep.iium.edu.my/66411/; https://www.springer.com/engineering/industrial+management/journal/170

This study investigates the use of nanopowder-mixed dielectric oil and temporary metallic coating on highly doped Si sample to achieve nanometric surface roughness using μ-WEDM operation. To achieve this, two different nanopowders were used in dielectric medium with two different temporary metallic...