Non-traditional machining techniques for silicon wafers

• Main Authors: Daud, Noor Dzulaikha, Hasan, Md. Nazibul, Saleh, Tanveer, Leow, Pei Ling, Mohamed Ali, Mohamed Sultan
• Format: Article
• Language: English
• Published: Springer Science and Business Media Deutschland GmbH 2022
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/100913/1/NoorDzulaikhaDaud2022_NonTraditionalMachiningTechnique.pdf; http://eprints.utm.my/id/eprint/100913/; http://dx.doi.org/10.1007/s00170-022-09365-z

Silicon (Si) micromachining techniques have recently witnessed significant advancement, attributable to the high surge in demand for microelectromechanical and microelectronic devices. Micromachining techniques are widely used to cut or pattern Si, in order to obtain high-quality surface finishes fo...