Heat-assisted μ-electrical discharge machining of silicon

• Main Authors: Daud, Noor Dzulaikha, Ghazali, Farah Afiqa Mohd, Hamid, Fatimah Khairiah Abd, Nafea, Marwan, Saleh, Tanveer, Leow, Pei Ling, Ali, Mohamed Sultan Mohamed
• Format: Article
• Language: English
• Published: Springer Nature 2021
• Subjects: T Technology (General)
• Online Access: http://irep.iium.edu.my/88380/1/88380_Heat-assisted%20%CE%BC-electrical.pdf; http://irep.iium.edu.my/88380/; https://link.springer.com/article/10.1007/s00170-021-06734-y

Micro-electrical discharge machining (μEDM) is an unconventional machining method that is suitable for machining of conductive materials including highly doped silicon (Si) wafers. This paper reports a novel method of heat-assisted μEDM machining of Si wafers by varying the temperature to increase...