Optimization of input process parameters variation on threshold voltage in 45 nm NMOS device
In this study, Taguchi method was used to optimize the influence of process parameter variations on threshold voltage (VTH) in 45 nm n-channel metal oxide semiconductor (NMOS) device. The orthogonal array, the signal-to-noise ratio, and analysis of variance were employed to study the performance cha...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
2023
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