Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Working Paper |
| Language: | English |
| Published: |
American Institute of Physics.
2013
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/26634 |
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