MOS Transistor Mask Design Using SEM Based E-Beam Lithography

• Main Authors: Uda, Hashim, Prof. Dr., Nur Hamidah, Abdul Halim, Mohammad Nuzaihan, Md Nor, Zul Azhar, Zahid Jamal, Prof. Dr.
• Other Authors: [e-mail]
• Format: Image
• Language: English
• Published: Malaysian Invention & Design Society (MINDS) 2010
• Subjects: E-Beam Lithography (EBL); MOS Transistor Mask Design; KUKUM > Research; International Invention, Innovation & Technology Exhibition; ITEX 2006
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/8345

Prof. Dr. Uda Hashim and his team won silver for MOS Transistor Mask Design Using SEM Based E-Beam Lithography at ITEX 2006, 19th - 21st May 2006 at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.